Compact Footprint
Space-efficient cabinet design helps minimize installation footprint without compromising internal chamber capacity.
Clean Construction
All interior seams are continuously welded on the insulation side, preventing contamination of the work chamber and supporting clean-process applications.
Enhanced Thermal Insulation
The chamber features 4-inch (10.2 cm) thick insulation to reduce heat loss, limit air leakage, and prevent external hot spots.
HEPA-Filtered Recirculation Air
Recirculating air is 100% filtered through a 99.99% efficient HEPA filter to support ISO Class 5 (Class 100) or better cleanroom operation.
Filter Monitoring
A Magnehelic gauge monitors pressure across the HEPA filter, providing a clear visual indication when replacement is required.
Advanced Process Control
Equipped with a high-resolution LCD interface and Protocol 3™-level control capabilities, including integrated data logging, USB port for data export, and streamlined oven configuration.
Silicone-Free Build
Constructed without silicone-based materials, making the unit suitable for processes sensitive to outgassing or contamination.
Cycle Completion Alarms
Audible and visual alarms indicate the end of cycle and signal high-limit temperature conditions for added safety.
Programmable Electronic Door Lock
Enhances process control and safety by automatically locking and unlocking the door according to programmed cycle conditions.
HEPA Filter Burn-Off and Chamber Cleaning
Includes installation, initial burn-off, and post-burn-off chamber cleaning of the HEPA filter to ensure clean operation from the outset.
Cleanroom Packaging
Oven is cleaned and triple-bagged in a cleanroom environment prior to shipment, supporting contamination-sensitive installations.
Utility Access Port
One 1-inch (2.5 cm) port with tri-clamp fitting located at the rear center of the oven provides convenient access for instrumentation or process gas connections.
Removable Cold Trap
Includes an easy-to-clean condensate trap that helps prevent polyimide buildup in the exhaust system during solvent-driven curing processes.
CE Compliance
Optional configuration available to meet CE requirements for use in applicable regions.
This high-performance, electrically heated clean-process oven is engineered specifically for polyimide baking and curing applications that demand tightly controlled atmospheric conditions. Designed to support hard bake processes in an inert environment, it features an advanced oxygen control system, integrated process monitoring, and specialized components to handle solvent management—all within an ISO Class 5 (Class 100) clean airflow design.
Solvent Management and Pressure Relief
During the hard bake stage of polyimide curing, residual solvents are driven off while surface properties are finalized. To manage this critical phase, the oven includes a pressure relief system with a removable cold trap. This easy-to-clean condensate trap captures solvent vapors and helps prevent buildup within the exhaust system, ensuring clean and reliable long-term operation.
Precision Oxygen Control
The system maintains ultra-low oxygen levels—20 ppm or below—through continuous monitoring and automated nitrogen purging. An integrated O₂ sensor is linked to the purge valve, triggering nitrogen flow when oxygen exceeds the preset threshold. A modulating valve, controlled by an onboard system, then fine-tunes nitrogen delivery throughout the curing process. This approach minimizes nitrogen consumption while ensuring oxidation-sensitive polyimides are cured under consistent, inert conditions.
Integrated Process Monitoring
A built-in PC workstation with a large-format flat panel display (15 in / 38.1 cm) supports real-time monitoring and data logging. The system runs advanced control software that interfaces with the oven controller, O₂ sensor, and other key subsystems. Users can access live feedback on temperature setpoints, actual chamber readings, and oxygen levels throughout the entire thermal cycle, enhancing traceability and process control.
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